
Proceedings of the ASME International Mechanical Engineering Congress and Exposition, November 15-20, 1998, Anaheim, California. Collection of 90 full-length peer-reviewed technical papers on the following Micro-Manufacturing Processes in MEMS and Other Advanced Systems, Applications of Micro-Fabrication to Fluid Mechanics, Micro-Electro-Mechanical Systems and Computational Methods for Analysis, Design and Simulation of MEMS. @ X. Zhang, E. Sickafus, F.K. Forster, K.S. Breuer, L. Lin, A.P Lee, T. Kenny, C.J. Kim, J. Jara-Almonte and T. Hirano
Page Count:
512
Publication Date:
2004-01-01
ISBN-10:
0791847144
ISBN-13:
9780791847145
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