Lang, Jeffrey; Pisano, Albert P. (Co-Chairs); Higuchi, Toshiro; Ikuta, Koji (Technical Co-Chairs); et.al. profile picture

Lang, Jeffrey; Pisano, Albert P. (Co-Chairs); Higuchi, Toshiro; Ikuta, Koji (Technical Co-Chairs); et.al.

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Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines, and Systems : Proceedings