Fujita, Hiroyuki; Esashi, Masayoshi (Co-Chairs); Benecke, Wolfgang; Fluitman, Jan H. (Technical Co-Chairs); et.al. profile picture

Fujita, Hiroyuki; Esashi, Masayoshi (Co-Chairs); Benecke, Wolfgang; Fluitman, Jan H. (Technical Co-Chairs); et.al.

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IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines, and Robots : Proceedings, Nara, Japan, 30 January-2 February 1991