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A.C. Diebold

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Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, ... MD, USA (AIP Conference Proceedings, 449b)
Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998 National Institute of Standards and Technology, Gaithersburg MD, USA