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Daniel J. C. Herr

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Metrology, inspection, and process control for microlithography XVII
Metrology, inspection, and process control for microlithography XVI
Alternative Lithographic Technologies III 1-3 March 2011, San Jose, California, United States
Alternative Lithographic Technologies II 23-25 February 2010, San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XVI 26 4-7 March, 2002, Santa Clara, [California] USA
Metrology, Inspection, and Process Control for Microlithography XVII 24-27 February, 2003, Santa Clara, California, USA
Nanoscience and Nanoengineering: Advances and Applications
Directed Self-assembly for Nanopatterning November 30 - December 5, 2014, Boston, Massachusetts, USA
Nanoscience and Nanoengineering Advances and Applications