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Kevin M. Monahan

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Stand Alone

Cost and Performance in Integrated Circuit Creation
Integrated Circuit Metrology, Inspection, and Process Control (Proceedings of Spie)
Micron and submicron integrated circuit metrology: August 22-23, 1985, San Diego, California (Proceedings of SPIE--the International Society for Optical Engineering)
Integrated Circuit Metrology, Inspection, and Process Control III Meeting : Papers
Integrated Circuit Metrology, Inspection, and Process Control II Meeting : Papers
Handbook of Critical Dimension Metrology and Process Control