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Joachim Frühauf

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Werkstoffe der Mikrotechnik Lehrbuch für Ingenieure ; mit 89 Tabellen
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures