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![Growth of Wide-band Gap AIN and (SiC)x [subscript X] (AIN)1-x [subscript 1-x] Thin Films by Reactive Magnetron Sputter Deposition](/_next/image?url=https%3A%2F%2Fstorage.googleapis.com%2Fmenrva_img_storage%2Fcovers%2Fgenerated%2F9789173730945.jpg&w=3840&q=80)