Selected Papers on Optical MEMS (SPIE Milestone Series Vol. MS153) (Spie Milestone Series, V. MS 153)
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Author Description
A selection of 81 papers on six major topics within the field of optical microelectromechanical systems (MEMS).
Page Count:
644
Publication Date:
1999-02-22
Publisher:
SPIE Press
ISBN-10:
081943129X
ISBN-13:
9780819431295