
Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio
Page Count:
692
Publication Date:
1997-01-01
ISBN-10:
0819423793
ISBN-13:
9780819423795
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