This volume explores the advancements in multilayer and grazing incidence X-ray/EUV optics, focusing on the theoretical and experimental developments in the field. It compiles research presented at the SPIE conference, detailing novel designs, fabrication techniques, and applications of these specialized optical systems. The papers cover a range of topics including the characterization of multilayer coatings, the performance of grazing incidence mirrors, and their use in various scientific instruments.

This collection of papers, presented at a SPIE conference, is aimed at researchers and engineers working in optics, X-ray, and extreme ultraviolet (EUV) technologies. The content reflects the state of the art in multilayer coatings and grazing incidence optics as of 1994, offering a snapshot of the field's progress. The technical depth suggests a readership familiar with optical physics and engineering principles. The compilation likely serves as a valuable reference for those developing or utilizing advanced optical systems for scientific and industrial applications.