This reference systematically explores and describes an abundance of micro-optomechatronic devices and applications. It outlines the power and position control of a laser beam, as well as fundamental principles in optical technology, showing how various MEMS devices are classified into several control patterns. The book explains the operation principles of devices within each control classification and introduces recent research in near-field optical memory where nanometer accuracy beam control is required. It discusses the theoretical background of optical beam control, covering history, application areas, and component technologies.

This reference is positioned as a comprehensive study for those interested in the intersection of optics, electronics, and mechanics within MEMS technology. The book aims to provide a thorough understanding of device classifications, operational principles, and the theoretical underpinnings of optical beam control. It delves into advanced applications such as near-field optical memory and reviews foundational concepts from laser oscillation to fluid dynamics, suggesting a text geared towards researchers and advanced students in the field.